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Reinforcing Experimental Centre for Non-equilibrium Studies with Application in Nano-technologies, Etching of Integrated Circuits and Environmental Research


Welcome to the homepage of the Centre for Non-equilibrium Processes!!

Activities in the Centre for Non-equilibrium Processes are oriented to the studies of the non-equilibrium plasmas and its application in Nano-technologies, etching of intergrated circuits and environmental research. They are related to:

  • studies motivated by the development of 40 nm technologies for integrated circuits related to plasma and fast neutral etching;

  • interaction of nonequilibrium plasmas with surfaces to achieve nanostructured hydrophobic surfaces and treatment of biological materials;

  • growth and control of nanotubes on surfaces and nano particles in gas phase and

  • suspended particles as atmospheric pollutants.

Proceedings of the Second Workshop on nonequilibrium processes

Proceedings of the 5th EU-Japan Symposium on Plasma Processing

Proceedings of the First Workshop on nonequilibrium processes

Plasma Electronics: Applications in Microelectronic Device Fabrication

Introductory transport theory for charged particles in gases

 

Centre for Non-equilibrium Processes Newsletter
eNotes

Issue 1 - June 2008

Issue 2 - August 2008

Issue 3 - December 2008

Issue 4 - June 2009

 

Institute of Physics homepage


24.02.2010.
Ivana Vasovic from GOSA Institute, Belgrade visited COE and gave a presentation about their work. Nikola Skoro (Research Assistant) presented a talk about gas heating in micro-discharges

18.02.2010.
Srdjan Marjanovic (Research Trainee) presented a talk about modeling of Surko trap for positrons

10.02.2010.
Ana Bankovic (Research Assistant) gave a talk on positrons in water vapour: cross section and transport properties

27.01.2010.
Nevena Puac (Research Associate) presented a talk about catalytics probes and COE cooperation with Institute Jozef Stefan, Ljubljana, Slovenia

23.12.2009.
Marija Radmilovic Radjenovic (Senior Research Associate) presented a talk about vacuum breakdown in RF cavities

23.12.2009.
Sasa Dujko (LGE member) presented a talk about topics in his PhD work (more...)

16.12.2009.
Milovan Suvakov (LGE member) presented a talk about topics in his PhD work (more...)

23.11-11.12.2009.
Dragana Maric (Research Associate) and Prof. Zoran Petrovic partook experimental investigations at the University of Ulster, Jordanstown, UK

16.11.2009.
COE members, prof. Zoran Petrovic and Ana Bankovic are co-authors on paper selected into the IOP Select! (more...)

10.11.2009.
News about first serbian Google wave robot developed in our laboratory published on the web (in serbian) (more...)

News Archive>>>


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