[Institut] Najava predavanja

[zoran]

Inzenjerska Akademija Jugoslavije organizuje predavanje


"Multiscale plasma etching model for ULSI fabrication".


Prof Toshiaki Makabe
Keio University, Japan


Predavanje se bavi optimizacijom plazma nagrizanja za primene u proizvodnji integrisanih kola ultra visokog nivoa integracije i proizvodnju nanostruktura

Predavanje ce se odrzati u svecanoj sali Gradjevinskog fakulteta (I Sprat) u petak 7.11.2003. u 18. casova


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